Multi-zone gas injection assembly with azimuthal and radial distribution control

ABSTRACT

A gas injection system includes (a) a side gas plenum, (b) a plurality of N gas inlets coupled to said side gas plenum, (c) plural side gas outlets extending radially inwardly from said plenum, (d) an N-way gas flow ratio controller having N outputs coupled to said N gas inlets respectively, and (e) an M-way gas flow ratio controller having M outputs, respective ones of said M outputs coupled to said tunable gas nozzle and a gas input of said N-way gas flow ratio controller.

BACKGROUND

1. Technical Field

The disclosure is related to process gas distribution in a plasmareactor for processing a workpiece such as a semiconductor wafer.

2. Background Discussion

Control of process gas distribution in the chamber of a plasma reactoraffects process control of etch rate distribution or deposition ratedistribution on a workpiece during plasma processing. Gas injectionnozzles can be located at the center and periphery of the chamber. It isdesirable to control gas injection at both the chamber center and at theperiphery. One problem is that systems that control radial distributionof process gas flow rate generally do not control azimuthal distributionof process gas flow rate. As employed in this specification, the term“azimuthal” refers to the circumferential direction in a cylindricalprocessing chamber. Another problem is that systems that controlazimuthal distribution of gas flow rate using gas injectors near theside wall suffer from pressure drops along the azimuthal direction.

A related problem is how to feed process gas to different zones of gasinjectors in such a manner as to avoid asymmetries in gas distributionwhile at the same time providing full control of both radial andazimuthal gas distributions.

Another problem is how to provide a gas distribution system that solvesall of the foregoing problems in a structure affording rapid disassemblyand re-assembly with close-fitting tolerances without damage.

The formation of gas distribution passages in one layer has generallylimited the location of the gas injectors of the chamber to that onelayer, which is typically flat and has no particular effect upon gasflow within the chamber.

SUMMARY

A plasma reactor having a chamber interior, a workpiece support and atunable gas nozzle, includes (a) a side gas plenum, (b) a plurality of Ngas inlets coupled to said side gas plenum, (c) plural side gas outletsextending radially inwardly from said plenum, (d) an N-way gas flowratio controller having N outputs coupled to said N gas inletsrespectively, and (e) an M-way gas flow ratio controller having Moutputs, respective ones of said M outputs coupled to said tunable gasnozzle and a gas input of said N-way gas flow ratio controller.

In one embodiment, the tunable gas nozzle has two gas input, and N isfour and M is three. The reactor may further include a gas supply panelcoupled to a gas input of the three-way gas flow controller. In oneembodiment, a process controller is coupled to the M-way gas flow ratiocontroller and to the N-way gas flow ratio controller, and a userinterface is coupled to the process controller.

In one embodiment, the side gas plenum includes plural sets of gas flowchannels, and each one of the sets of gas flow channels includes: (a) anarcuate gas distribution channel having a pair of ends coupled to acorresponding pair of the plural side gas outlets, and (b) an arcuategas supply channel, one end of the arcuate gas supply channel connectedto a corresponding one of the plurality of N gas inlets, and an oppositeend of the arcuate gas supply channel coupled to the gas distributionchannel proximate a middle point of the gas distribution channel.

In a related embodiment, the plural sets of gas flow channels are ofequal path lengths between respective gas inlet and a respective sidegas outlet.

In one embodiment, the cylindrical side wall includes a liner edge, theplasma reactor further including: (a) a gas delivery ring over the lineredge, the plural sets of gas flow channels being formed in the gasdelivery ring, and (b) a top liner ring over the gas delivery ring, theplural side gas outlets extending into the top liner ring, the top linerring including a top liner ring surface facing the chamber interior.

In a related embodiment, each of the plural side gas outlets includes:(a) a side gas injection nozzle extending radially in the top liner ringtoward the chamber interior and including an axially extending gasdelivery insert-receiving hole, and (b) a gas delivery insert extendingfrom the gas delivery ring into the axially extending gas deliveryinsert-receiving hole.

The plasma reactor may further include an axial internal gas flowpassage in the gas delivery insert and a radial internal gas flow nozzlepassage through a side wall of the axially extending gas delivery inserthole, the axial internal gas flow passage being in registration with theradial internal gas flow nozzle passage.

In one embodiment, the top liner ring includes plural nozzle pockets inthe top liner ring surface, the side gas injection nozzle extending intoa corresponding one of the nozzle pockets. Moreover, the side gasinjection nozzle includes plural O-ring nozzle grooves concentric withthe side gas injection nozzle, the plasma reactor further includingfirst plural O-rings in the plural O-ring nozzle grooves compressedagainst an interior side wall of a corresponding one of the nozzlepockets.

In one embodiment, the side gas injection nozzle further includes: (a) acylindrical outer nozzle surface, wherein the O-ring nozzle groovesdefine nozzle groove surfaces indented with respect to the cylindricalouter nozzle surface, and (b) an axial evacuation slot including slotsections in the cylindrical outer nozzle surface beginning at an end ofthe side gas injection nozzle inside the nozzle pocket, and slotsections in the nozzle groove surfaces.

In further embodiment, there is a gap between the cylindrical outernozzle surface and the interior side wall of a corresponding one of thenozzle pockets, the slot sections in the nozzle groove surfacesproviding an evacuation path around the first plural O-rings, the slotsections in the cylindrical outer nozzle surface providing an evacuationpath to the gap.

In one embodiment, the top liner ring further includes plural gasdelivery insert pockets facing the gas delivery ring, a portion of thegas delivery insert extending into a corresponding one of the gasdelivery insert pockets. In the same embodiment, the gas delivery inertincludes plural O-ring insert grooves concentric with the gas deliveryinsert, the plasma reactor further including second plural O-rings inthe plural O-ring insert grooves compressed against an interior sidewall of a corresponding one of the plural gas delivery insert pockets.

In one embodiment, each of the plural gas outlets further includes anaxial port in the gas delivery ring extending to the axial internal gasflow passage of the gas delivery insert.

In an embodiment, the side gas injection nozzle includes a ceramicmaterial, and the gas delivery ring and the gas delivery insert includesteel, and the top liner surface and the cylindrical side wall includesa protective layer including an anodized material or Yttria.

In a further aspect, a side gas injection kit is provided, including: atop liner ring including plural nozzle pockets, plural side gasinjection nozzles extending into the nozzle pockets, each of the pluralside gas injection nozzles including: (a) an outer nozzle surface andplural O-ring nozzle grooves in the outer nozzle surface and concentricwith the side gas injection nozzle, and (b) first plural O-rings in theplural O-ring nozzle grooves compressed against an interior side wall ofa corresponding one of the nozzle pockets.

In one embodiment, the side gas injection nozzle further includes: (a)nozzle groove surfaces indented with respect to the outer nozzle surfaceand formed in the O-ring nozzle grooves, and (b) an axial evacuationslot including slot sections in the cylindrical outer nozzle surfacebeginning at an end of the side gas injection nozzle inside the nozzlepocket, and slot sections in the nozzle groove surfaces.

In a related embodiment, the side gas injection kit further includes agap between the cylindrical outer nozzle surface and an interior sidewall of a corresponding one of the nozzle pockets, the slot sections inthe nozzle groove surfaces providing an evacuation path around the firstplural O-rings, the slot sections in the cylindrical outer nozzlesurface providing an evacuation path to the gap.

In a further related embodiment, the side gas injection kit furthercomprises: (a) plural gas delivery insert pockets in the top liner ring,(b) plural gas delivery extending into the gas delivery insert pockets,and (c) each of the gas delivery inserts including plural O-ring insertgrooves concentric with the gas delivery insert, and second pluralO-rings in the plural O-ring insert grooves compressed against aninterior side wall of a corresponding one of the plural gas deliveryinsert pockets.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the exemplary embodiments of the presentinvention are attained can be understood in detail, a more detaileddescription of the invention, briefly summarized above, may be obtainedby reference to the embodiments thereof which are illustrated in theappended drawings. It is to be appreciated that certain well knownprocesses are not discussed herein in order to not obscure theinvention.

FIG. 1 is a simplified block diagram of one embodiment.

FIG. 2 is an elevational view corresponding to FIG. 1.

FIG. 3 depicts an embodiment having eight gas outlets.

FIG. 4 depicts a side gas delivery kit for the embodiment of FIG. 3.

FIG. 5 is a cut-away cross-sectional view of the side gas delivery kitof FIG. 4.

FIG. 6 is an enlarged view of a portion of FIG. 5.

FIG. 7 depicts the bottom liner.

FIG. 8 illustrates the workpiece support pedestal enclosed by the bottomliner.

FIG. 9 depicts a view of the top liner ring from the top.

FIG. 10 depicts a view of the top liner ring from the bottom.

FIG. 11 is an enlarged view of a portion of FIG. 10.

FIGS. 12 and 13 are top and bottom views, respectively, of the gasdelivery ring.

FIG. 14 is an enlarged cross-sectional view taken along lines 14-14 ofFIG. 12.

FIG. 15 is an enlarged view of the injection nozzle of FIG. 6.

FIG. 16 is a cross-sectional view corresponding to FIG. 15.

FIG. 17 is an enlarged view of the gas delivery insert of FIG. 6.

FIG. 18 is a cross-sectional view corresponding to FIG. 17.

FIG. 19 depicts a gas delivery block employed in the embodiment of FIG.4.

FIG. 20 is a cross-sectional view corresponding to FIG. 19.

FIG. 21 depicts an exploded assembly of the gas distribution ring, thetop liner ring 144, the injection nozzles and the gas distributioninserts of FIG. 4.

FIG. 22 is an enlarged view of a portion of FIG. 21.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. It is contemplated that elements and features of oneembodiment may be beneficially incorporated in other embodiments withoutfurther recitation. It is to be noted, however, that the appendeddrawings illustrate only exemplary embodiments of this invention and aretherefore not to be considered limiting of its scope, for the inventionmay admit to other equally effective embodiments.

DETAILED DESCRIPTION

FIG. 1 is a simplified block diagram of one embodiment. A plasma reactorchamber 100, depicted in elevational view in FIG. 2, is enclosed by acylindrical side wall 102 defining a chamber volume 104. A workpiecesupport pedestal 106 is inside the chamber volume and rests on apedestal lift mechanism 108 shown in FIG. 2. As depicted in FIG. 2, atunable gas nozzle 110 is mounted on a ceiling 112 of the chamber 100,and has a center gas nozzle 114 and a side gas nozzle 116 that injectgas toward the center and side, respectively, of the chamber 100. Thecenter and side gas nozzles 114, 116 are independently fed by gas supplylines 114 a, 116 a which are labeled “nozzle 1” and “nozzle 2”,respectively, in FIG. 1. A circular side gas injection plenum 118receives process gas at four gas inlets 120 and injects process gas intothe chamber at plural gas outlets 122. As shown in FIG. 1, the four gasinlets 120 are connected respectively to four supply lines labeled “sidegas 1”, “side gas 2”, “side gas 3” and “side gas 4” in FIG. 1, which arefed by four outputs of a four-way gas flow ratio controller 124. Theinput of the four-way gas flow ratio controller 124 and the gas supplylines 114 a and 116 a receive process gas from respective outputs of athree-way gas flow ratio controller 126. A gas supply panel 128furnishes process gas to the input of the three-way gas flow ratiocontroller 126. A controller 130 having a user interface 132 governs thegas flow ratio controllers 124 and 126.

The gas injection pattern in the chamber 100 has three concentric zonesincluding a center zone governed by the center gas nozzle 114, an innerzone governed by the side gas nozzle 116 and a peripheral zone governedby the gas outlets 122. The user may adjust the gas flow ratios amongthe three concentric zones by controlling the three-way gas flow ratiocontroller 126. In addition, the user may govern azimuthal(circumferential) gas distribution by controlling the four-way gas flowratio controller 124. An advantage is that the gas flow ratiocontrollers 124 and 126 provide simultaneous independent control of bothradial distribution of gas flow and azimuthal distribution of gas flow.A further advantage is that the gas outlets 122 at the chamber peripheryare fed in parallel, and the pressure losses are uniformly distributedin the azimuthal direction.

FIG. 3 depicts an embodiment in which there are eight gas outlets 122.Any other suitable number of gas outlets may be employed in otherembodiments. In the embodiment of FIG. 3, the plenum 118 of FIG. 1 isembodied in four pairs of recursive gas flow channels, each pairincluding an arcuate gas distribution channel 136 and an arcuate gassupply channel 138. The four pairs of recursive gas flow channels 136,138 provide parallel paths between the gas inlets 120 and the gasoutlets 122. Each pair of the eight gas outlets 122 of FIG. 3 is fedfrom a corresponding gas inlet 120 via a corresponding pair of therecursive gas flow channels 136, 138. Each gas distribution channel 136has a pair of ends connected to the corresponding pair of gas outlets122, and is fed at its center by one end of the corresponding arcuategas supply channel 138, the other end of the gas supply channel 138connected to the corresponding gas inlet 120.

FIG. 4 depicts a side gas delivery kit for the embodiment of FIG. 3,including a top liner ring 140, a bottom liner 142, and a gas deliveryring 144 between the top liner ring 140 and the bottom liner 142. Thebottom liner 142 includes the side wall 102 of FIG. 3. The gas deliveryring 144 contains the recursive gas flow channels 136, 138 of FIG. 3, aswill be described below in greater detail. FIG. 5 is a cut-awaycross-sectional view of the side gas delivery kit of FIG. 4, showing agas delivery insert 146 extending from the gas delivery ring 144 intothe top liner ring 140, and further showing a injection nozzle 148 inthe top liner ring 140.

FIG. 6 is an enlarged view of a portion of FIG. 5, showing in greaterdetail the gas delivery insert 146 and the injection nozzle 148. The gasdelivery insert 146 is supported on the gas delivery ring 144. The gasdelivery insert 146 has an internal axial insert gas flow passage 150coupled to one end of a corresponding gas distribution channel 136, aswill be described in greater detail below. The top of the gas deliveryinsert 146 is received inside the injection nozzle 148 near a radiallyouter end of the injection nozzle 148. The injection nozzle 148 has aninternal radial nozzle gas flow passage 152 in communication with theinternal axial insert gas flow passage 150. The radially inner end ofthe injection nozzle 148 is open to the interior of the chamber 100.Each gas outlet 122 in the embodiment of FIG. 3 is implemented by acorresponding injection nozzle 148 and a corresponding gas deliveryinsert 146 of FIG. 6.

FIG. 7 depicts the bottom liner 142. FIG. 8 shows how the workpiecesupport pedestal is enclosed by the bottom liner 142. The bottom liner142 has three symmetrically disposed slit openings 154 for wafertransfer.

FIG. 9 depicts a view of the top liner ring 140 from the top, while FIG.10 depicts a view of the top liner ring 140 from the bottom. The topliner ring 140 has an annular bottom surface 156 from which theinjection nozzles 148 open into the chamber 100. The annular bottomsurface 156 is concave and provides a transition between the radius of aridge 158 conforming to the bottom liner 142 and an inner radius of anopening 160 at the top of the top liner ring 140. The curvature of theannular bottom surface 156 can promote gas flow from each injectionnozzle 148 toward the workpiece.

FIG. 11 is an enlarged view of a portion of FIG. 10, showing one ofeight hollow nozzle pockets 164 formed in the top liner ring 140 and oneof eight hollow gas delivery insert pockets 166 formed in the top linerring 140. The injection nozzle 148 shown in FIG. 6 is held inside thenozzle pocket 164, as will be described below. A portion of the gasdelivery inert 146 shown in FIG. 6 is held inside the gas deliveryinsert pocket 166, as will be described below. As shown in FIG. 11, thenozzle pocket 164 is cylindrically shaped, extends in a radial directionand forms an opening 164 a in the annular bottom surface 156. The gasdelivery insert pocket 166 is formed in a shelf 170 extending outwardlyfrom a circumferential periphery 172 of the top liner ring 140.

FIGS. 12 and 13 are top and bottom views, respectively, of the gasdelivery ring 144. FIG. 12 shows the formation of the four gasdistribution channels 136 and the four gas supply channels 138 in thegas delivery ring 144. Each gas supply channel 138 receives gas from thecorresponding gas inlet 120. Each gas inlet 120 (FIG. 3) includes anaxial port 120-1 (FIG. 13) formed in a tab 144-1 extending from aperiphery 144-2 of the gas delivery ring 144. The axial port 120-1 opensthrough a bottom surface of the tab 144-1. A radially extending gasinlet channel 120-2 (FIG. 12) is coupled between the axial port 120-1and one end 138-1 of the gas supply channel 138. An opposite end 138-2of the gas supply channel 138 is coupled to the middle of the gasdistribution channel 136. Each end 136-1 and 136-2 of the gasdistribution channel 136 terminates at an axial gas outlet 122′. Theaxial gas outlet 122′ is coupled to the bottom of the internal axialinsert gas flow passage 150 of a gas delivery insert 146, as shown inFIG. 6. In this manner, the four gas distribution channels 136 feedeight gas delivery inserts 146. In the illustrated embodiment, there aretwo axial gas ports 120-1 in each tab 144-1 feeding respective sets ofthe gas flow channels 136, 138. In the illustrated embodiment, the gasdistribution channels 136 and the gas supply channels 138 follow arcuatepaths that are concentric with the cylindrical side wall 102. The gasdistribution channels 136, the gas supply channels 138 and the radialgas inlet channel 120-2 provide respective paths between the gas inlets120 and the gas outlets 122 that are of equal length. An advantage ofthe equal path lengths is a reduction in non-uniformity in gas flowresistance among the various paths, affording better process control.

FIG. 14 is an enlarged cross-sectional view taken along lines 14-14 ofFIG. 12, and shows one of the gas distribution channels 136 formed inthe gas delivery ring 144 and covered by a gas channel cover 171. FIG.14 further shows the intersection between one end of the gasdistribution channel 136 and the gas outlet 122′.

The injection nozzle 148 of FIG. 6 is depicted in detail in FIG. 15 andin cross-section in FIG. 16. The injection nozzle 148 has a cylindricalbody 180 through which the internal radial nozzle gas flow passage 152extends to a gas injection passage 182 forming an orifice 184 at theradially inner end 180 a of the cylindrical body 180. An axiallyextending gas delivery insert hole 186 is formed through the cylindricalbody 180 near its radially outer end 180 b. The gas delivery insert 146is received in the gas delivery insert hole 186. A first O-ring groove188 concentric with the cylindrical body 180 is formed near the radiallyouter end 180 b of the cylindrical body 180 and defines a first O-ringgroove inner surface 188 a. A second O-ring groove 190 concentric withthe cylindrical body 180 is formed in the cylindrical body 180 betweenthe first O-ring groove 188 and the radially inner end 180 a, anddefines a second O-ring groove inner surface 190 a. An axial evacuationslot 192 is formed in the surface of the cylindrical body 180, andincludes a first slot section 192-1 between the radial outer end 180 band the first O-ring groove 188, a second slot section 192-2 between thefirst and second O-ring grooves 188 and 190, and a third slot section192-3 extending for a short distance from the second O-ring groove 190toward the radially inner end 180 a. The axial slot 192 further includesa first groove axial slot section 192-4 in the first O-ring groove innersurface 188 a and a second groove axial slot section 192-5 in the secondO-ring groove inner surface 190 b. As shown in FIGS. 6, O-rings 194 areinserted into the first and second O-ring grooves 188 and 190. There isa small nozzle-to-pocket clearance or gap between the cylindrical body180 and the interior surface of the nozzle pocket 164. The axial slot192 enables the evacuation through the nozzle-to-pocket gap of gastrapped between the radial outer end 180 b of the injection nozzle 148and the back wall 164 b (FIG. 11) of the nozzle pocket 164. The axialslot 192 enables the evacuated air to bypass the O-rings 194.

FIG. 17 depicts the gas delivery insert 146 shown in FIG. 6. FIG. 18 isa cross-sectional view corresponding to FIG. 17. Referring to FIGS. 17and 18, the gas delivery insert 146 includes a cylindrical insert post202 supported on a generally flat insert base 204. The internal axialinsert gas flow passage 150 shown in FIG. 6 extends through thecylindrical insert post 202. Gas outlets 205 a and 205 b through thecylindrical insert post 202 intersect the internal axial insert gas flowpassage 150. In forming the assembly of FIG. 6, the cylindrical insertpost 202 (FIG. 18) is inserted into the gas delivery insert hole 186 ofthe injection nozzle 148 of FIG. 16 until the gas outlets 205 a and 205b are in registration with the internal radial nozzle gas flow passage152 of FIG. 6.

The cylindrical insert post 202 has O-ring grooves 206, 208 concentricwith the cylindrical insert post 202 in which O-rings 209 (FIG. 6) arereceived. Interior surface 186 a of the gas inlet hole 186 (FIG. 16) isan O-ring sealing surface against which the O-ring 209 is pressed uponinsertion of the insert post 202 into the gas inlet hole 186. An O-ringgroove 210 (FIG. 18) is formed in the top surface of the insert base 204around the bottom of the cylindrical insert post 202. An O-ring groove212 (FIG. 18) is formed in the bottom surface of the insert base 204concentric with the cylindrical insert post 202. An O-ring 216 (FIG. 6)is held in the O-ring groove 212 for fitting the gas delivery insert 146against the top liner ring 140. An O-ring 214 (FIG. 6) is held in theO-ring groove 210 for fitting the insert base 204 onto the gas deliveryring 144.

The description of FIGS. 12 and 13 above refers to two tabs 144-1 of thegas delivery ring 144, each tab 144-1 supporting a pair of gas inletports 120-1 open at the bottom surface of the tab 144-1. FIGS. 19 and 20depict a gas delivery block 220 for fastening to the bottom surface of atab 144-1 and having a pair of gas inlet stems 222 that meet the pair ofgas inlet ports 120-1 upon joining of the gas delivery block 220 to thetab 144-1. The illustrated pair of gas inlet stems 222 provideconnection to two outputs of the four-way gas flow ratio controller 124.

Radial distribution of gas flow is adjusted by controlling the three-waygas flow ratio controller 126. Independently, azimuthal gas distributionis adjusted controlling the four-way gas flow ratio controller 124. Anadvantage is that the gas flow ratio controllers 124 and 126 providesimultaneous independent control of both radial distribution of gas flowand azimuthal distribution of gas flow. A further advantage is that thegas outlets 122 at the chamber periphery are fed in parallel, and thepressure losses are uniformly distributed in the azimuthal direction.This latter feature simplifies control of azimuthal gas distribution.

The gas injection inserts 146 facilitate the location of the injectionnozzles 148 in the concave surface 156 of the top gas ring 140. Gasinjection from the side is optimized because the injection nozzles 148are located in the concave surface 156 of the top liner ring 140, andthe injected gas is guided by the concave surface 156. The top gas ring140 and the injection nozzles 148 are located in a plane above the gasdelivery ring 144 containing the four pairs of recursive gas flowchannels 136, 138. Gas flow paths spanning the gap between the plane ofthe injection nozzles 148 and the gas delivery ring 144 are provided bythe gas delivery inserts 146.

Referring to FIGS. 21 and 22, the top liner ring 140, the gas deliveryring 144, the eight gas delivery inserts 146 and the eight injectionnozzles 148 are separate pieces, which enables the selection ofmaterials to be optimized for each individual piece, and facilitates anefficient modular assembly. In an embodiment, the gas delivery ring 144comes into contact with process gases but not with plasma. They aretherefore formed of a ceramic material (or stainless steel or othersuitable material) that is compatible with process gases employed inplasma processes such as a plasma enhanced reactive ion etch process, orplasma enhanced chemical vapor deposition process, as some examples. Theinjection nozzles 148 face the plasma processing zone of the chamber,and therefore are formed of a material, such as a ceramic material, thatis compatible with exposure to plasma. The top liner ring 140 and thebottom liner 142 may be formed of a material which is not generallycompatible with exposure to plasma. To avoid exposure of the material toplasma, the interior surface of the side wall 102 and the annular bottomsurface 156 of the top liner ring 140 are covered with a protectivelayer compatible with exposure to plasma. The side wall 102 and the topliner ring 140 may be formed of aluminum, and their protective coatingsmay comprise Yttria or may be formed by anodization.

The modular parts may be conveniently and repetitively assembled anddisassembled in the manner depicted in FIGS. 21 and 22 without damage tothe various parts, while permitting a close fitting between parts, duein part to the protection afforded by the O-rings referred to above.Specifically, the O-rings 194 of FIG. 6 protect the injection nozzles148 during their insertion in the nozzle pockets 164. The O-rings 209 onthe gas delivery inserts 146 protect the injection nozzles 148 from thegas delivery inserts during insertion of the inserts 146 into theinsert-receiving holes 186 in the injection nozzles 148. The O-rings 194and 209 are elastically compressible in one embodiment.

Assembly procedure in FIGS. 21 and 22 entails inserting the injectionnozzles 148 into the nozzle pockets 164 in the top liner ring 140,mounting the gas delivery inserts 146 on the gas delivery ring 140, andthen bringing the gas delivery ring 144 and the top liner ring 144together so as to insert the gas delivery inserts 146 into therespective insert-receiving holes 186.

While the illustrated embodiment exemplifies four-way symmetry involvingeight injection nozzles 148, other symmetries may be employed involvinga different number of injection nozzles 148.

While the foregoing is directed to embodiments of the present invention,other and further embodiments of the invention may be devised withoutdeparting from the basic scope thereof, and the scope thereof isdetermined by the claims that follow.

1. A plasma reactor comprising: a chamber, a tunable gas nozzle coupledto said chamber and a side gas plenum around said chamber; a pluralityof N gas inlets coupled to said side gas plenum, and plural side gasoutlets extending radially from said side gas plenum; an N-way gas flowratio controller having N outputs coupled to said N gas inletsrespectively; and an M-way gas flow ratio controller having M outputs,respective ones of said M outputs coupled to said tunable gas nozzle anda gas input of said N-way gas flow ratio controller.
 2. The plasmareactor of claim 1 wherein said tunable gas nozzle has two gas inputscoupled to two of said M outputs, and wherein M is three and N is four.3. The plasma reactor of claim 1 further comprising: a gas supply panelcoupled to a gas input of said M-way gas flow controller.
 4. The plasmareactor of claim 3 further comprising: a process controller coupled tosaid M-way gas flow ratio controller and to said N-way gas flow ratiocontroller; and a user interface coupled to said process controller. 5.The plasma reactor of claim 1 wherein said side gas plenum comprisesplural sets of gas flow channels, each one of said sets of gas flowchannels comprising: an arcuate gas distribution channel having a pairof ends coupled to a corresponding pair of said plural side gas outlets;and an arcuate gas supply channel, one end of said arcuate gas supplychannel connected to a corresponding one of said plurality of N gasinlets, and an opposite end of said arcuate gas supply channel coupledto said gas distribution channel near a middle point of said gasdistribution channel.
 6. The plasma reactor of claim 5 wherein saidplural sets of gas flow channels are of equal path lengths.
 7. Theplasma reactor of claim 5 wherein said side gas plenum comprises a lineredge, said plasma reactor further comprising: a gas delivery ring oversaid liner edge, said plural sets of gas flow channels being formed insaid gas delivery ring; and a top liner ring over said gas deliveryring, said plural side gas outlets extending into said top liner ring,said top liner ring comprising a top liner ring surface facing saidchamber interior.
 8. The plasma reactor of claim 7 wherein each of saidplural side gas outlets comprises: a side gas injection nozzle extendingradially within said top liner ring toward said chamber interior andcomprising an axially extending gas delivery insert-receiving hole; anda gas delivery insert extending from said gas delivery ring into saidaxially extending gas delivery insert-receiving hole.
 9. The plasmareactor of claim 8 further comprising: an axial internal gas flowpassage in said gas delivery insert and a radial internal gas flownozzle passage through a side wall of said axially extending gasdelivery insert hole, said axial internal gas flow passage being inregistration with said radial internal gas flow nozzle passage.
 10. Theplasma reactor of claim 9 wherein: said top liner ring comprises pluralnozzle pockets in said top liner ring surface, said side gas injectionnozzle extending into a corresponding one of said nozzle pockets; andsaid side gas injection nozzle comprises plural O-ring nozzle groovesconcentric with said side gas injection nozzle, said plasma reactorfurther comprising first plural O-rings in said plural O-ring nozzlegrooves compressed against an interior side wall of a corresponding oneof said nozzle pockets.
 11. The plasma reactor of claim 10 wherein saidside gas injection nozzle further comprises: a cylindrical outer nozzlesurface, wherein said O-ring nozzle grooves define nozzle groovesurfaces indented with respect to said cylindrical outer nozzle surface;and an axial evacuation slot comprising: (a) slot sections in saidcylindrical outer nozzle surface extending from an end of said side gasinjection nozzle inside said nozzle pocket, and (b) slot sections insaid nozzle groove surfaces.
 12. The plasma reactor of claim 11 furthercomprising a gap between said cylindrical outer nozzle surface and saidinterior side wall of a corresponding one of said nozzle pockets. 13-15.(canceled)
 16. The plasma reactor of claim 10 wherein: said top linerring further comprises plural gas delivery insert pockets facing saidgas delivery ring, a portion of said gas delivery insert extending intoa corresponding one of said gas delivery insert pockets; said gasdelivery inert comprises plural O-ring insert grooves concentric withsaid gas delivery insert, said plasma reactor further comprising secondplural O-rings in said plural O-ring insert grooves compressed againstan interior side wall of a corresponding one of said plural gas deliveryinsert pockets.
 17. The plasma reactor of claim 12 each of said pluralgas outlets further comprises an axial port in said gas delivery ringextending to said axial internal gas flow passage of said gas deliveryinsert.
 18. The plasma reactor of claim 8 wherein: said side gasinjection nozzle comprises a ceramic material, and said gas deliveryring and said gas delivery insert comprise steel; said top liner surfaceand said cylindrical side wall comprises a protective layer comprisingan anodized material or Yttria.
 19. A side gas injection kit,comprising: a top liner ring comprising plural nozzle pockets; pluralside gas injection nozzles extending into said nozzle pockets, each ofsaid plural side gas injection nozzles comprising: an outer nozzlesurface and plural O-ring nozzle grooves in said outer nozzle surfaceand concentric with said side gas injection nozzle; first plural O-ringsin said plural O-ring nozzle grooves compressed against an interior sidewall of a corresponding one of said nozzle pockets.
 20. The side gasinjection kit of claim 19 wherein said side gas injection nozzle furthercomprises: nozzle groove surfaces indented with respect to said outernozzle surface and formed in said O-ring nozzle grooves; an axialevacuation slot comprising slot sections in said cylindrical outernozzle surface extending from an end of said side gas injection nozzleinside said nozzle pocket, and slot sections in said nozzle groovesurfaces.
 21. The side gas injection kit of claim 20 further comprisinga gap between said cylindrical outer nozzle surface and an interior sidewall of a corresponding one of said nozzle pockets, said slot sectionsin said nozzle groove surfaces providing an evacuation path around saidfirst plural O-rings, said slot sections in said cylindrical outernozzle surface providing an evacuation path to said gap.
 22. The sidegas injection kit of claim 21 further comprising: plural gas deliveryinsert pockets in said top liner ring; plural gas delivery insertsextending into said gas delivery insert pockets; each of said gasdelivery inserts comprising plural O-ring insert grooves concentric withsaid gas delivery insert, and second plural O-rings in said pluralO-ring insert grooves compressed against an interior side wall of acorresponding one of said plural gas delivery insert pockets.
 23. Theside gas injection kit of claim 22 wherein: said side gas injectionnozzle comprises a ceramic material, said gas delivery insert comprisessteel and said top liner surface comprises a protective layer comprisingan anodized material or Yttria.